Microelectronic imaging units

ABSTRACT

Methods for manufacturing microelectronic imaging units and microelectronic imaging units that are formed using such methods are disclosed herein. In one embodiment, a method includes coupling a plurality of singulated imaging dies to a support member. The individual imaging dies include an image sensor, an integrated circuit operably coupled to the image sensor, and a plurality of external contacts operably coupled to the integrated circuit. The method further includes forming a plurality of stand-offs on corresponding imaging dies before and/or after the imaging dies are singulated and electrically connecting the external contacts of the imaging dies to corresponding terminals on the support member. The individual stand-offs include a portion between adjacent external contacts.

This application is a divisional application of application Ser. No.10/901,851, filed Jul. 28, 2004, which is incorporated herein byreference in its entirety.

TECHNICAL FIELD

The present invention is related to microelectronic imaging units havingsolid-state image sensors and methods for manufacturing such imagingunits.

BACKGROUND

Microelectronic imagers are used in digital cameras, wireless deviceswith picture capabilities, and many other applications. Cell phones andPersonal Digital Assistants (PDAs), for example, are incorporatingmicroelectronic imagers for capturing and sending pictures. The growthrate of microelectronic imagers has been steadily increasing as theybecome smaller and produce better images with higher pixel counts.

Microelectronic imagers include image sensors that use Charged CoupledDevice (CCD) systems, Complementary Metal-Oxide Semiconductor (CMOS)systems, or other solid-state systems. CCD image sensors have beenwidely used in digital cameras and other applications. CMOS imagesensors are also quickly becoming very popular because they are expectedto have low production costs, high yields, and small sizes. CMOS imagesensors can provide these advantages because they are manufactured usingtechnology and equipment developed for fabricating semiconductordevices. CMOS image sensors, as well as CCD image sensors, areaccordingly “packaged” to protect their delicate components and toprovide external electrical contacts.

FIG. 1 is a schematic side cross-sectional view of a conventionalmicroelectronic imaging unit 1 including an imaging die 10, a chipcarrier 30 carrying the die 10, and a cover 50 attached to the carrier30 and positioned over the die 10. The imaging die 10 includes an imagesensor 12 and a plurality of bond-pads 16 operably coupled to the imagesensor 12. The chip carrier 30 has a base 32, sidewalls 34 projectingfrom the base 32, and a recess 36 defined by the base 32 and sidewalls34. The die 10 is accordingly sized to be received within the recess 36and attached to the base 32. The chip carrier 30 further includes anarray of terminals 18 on the base 32, an array of contacts 24 on anexternal surface 38, and a plurality of traces 22 electricallyconnecting the terminals 18 to corresponding external contacts 24. Theterminals 18 are positioned between the die 10 and the sidewalls 34 sothat wire-bonds 20 can electrically couple the terminals 18 tocorresponding bond-pads 16 on the die 10.

One problem with the microelectronic imaging unit 1 illustrated in FIG.1 is that the die 10 must be sized and configured to fit within therecess 36 of the chip carrier 30. Dies having different shapes and/orsizes accordingly require chip carriers configured to house thosespecific types of dies. As such, manufacturing imaging units with dieshaving different sizes requires fabricating various configurations ofchip carriers and significantly retooling the manufacturing process.

Another problem with conventional microelectronic imaging units is thatthey have relatively large footprints. For example, the footprint of theimaging unit 1 in FIG. 1 is the surface area of the base 32 of the chipcarrier 30, which is significantly larger than the surface area of thedie 10. Accordingly, the footprint of conventional microelectronicimaging units can be a limiting factor in the design and marketabilityof picture cell phones or PDAs because these devices are continuallybeing made smaller in order to be more portable. Therefore, there is aneed to provide microelectronic imaging units with smaller footprints.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic side cross-sectional view of a conventionalmicroelectronic imaging unit in accordance with the prior art.

FIGS. 2-5 illustrate stages in one embodiment of a method formanufacturing a plurality of microelectronic imaging units in accordancewith the invention.

FIG. 2 is a schematic side cross-sectional view of a microfeatureworkpiece having a substrate and a plurality of microelectronic imagingdies formed in and/or on the substrate.

FIG. 3A is a top plan view of the microfeature workpiece after forming aplurality of openings in a stand-off layer.

FIG. 3B is a schematic side cross-sectional view taken substantiallyalong line A-A of FIG. 3A.

FIG. 4A is a schematic side cross-sectional view of an assemblyincluding a plurality of singulated microelectronic imaging diesarranged in an array on a support member.

FIG. 4B is a top plan view of the assembly illustrated in FIG. 4A.

FIG. 5 is a schematic side cross-sectional view of the assembly afterattaching a plurality of covers to corresponding stand-offs.

FIGS. 6A-7 illustrate stages in another embodiment of a method formanufacturing a plurality of microelectronic imaging units in accordancewith the invention.

FIG. 6A is a schematic side cross-sectional view of an assemblyincluding a plurality of microelectronic imaging dies arranged in anarray on a support member.

FIG. 6B is a top plan view of the assembly of FIG. 6A.

FIG. 7 is a schematic side cross-sectional view of the assembly afterwire-bonding the imaging dies to the support member and attaching aplurality of covers to corresponding dies.

FIGS. 8A-9 illustrate stages in another embodiment of a method formanufacturing a plurality of microelectronic imaging units in accordancewith the invention.

FIG. 8A is a schematic side cross-sectional view of an assemblyincluding a plurality of imaging dies arranged in an array on a supportmember.

FIG. 8B is a top plan view of the assembly of FIG. 8A.

FIG. 9 is a schematic side cross-sectional view of the assembly afterattaching a plurality of covers to corresponding imaging dies.

DETAILED DESCRIPTION

A. Overview

The following disclosure describes several embodiments of methods formanufacturing microelectronic imaging units and microelectronic imagingunits that are formed using such methods. One aspect of the invention isdirected toward methods for manufacturing a plurality of imaging units.An embodiment of one such method includes coupling a plurality ofsingulated imaging dies to a support member. The individual imaging dieshave an image sensor, an integrated circuit operably coupled to theimage sensor, and a plurality of external contacts operably coupled tothe integrated circuit. The method further includes forming a pluralityof stand-offs on corresponding imaging dies before and/or after theimaging dies are singulated and electrically connecting the externalcontacts of the imaging dies to corresponding terminals on the supportmember. The individual stand-offs include a portion between adjacentexternal contacts.

In another embodiment, a method includes providing a plurality ofimaging dies. The individual imaging dies have an image sensor, anintegrated circuit operably coupled to the image sensor, and a pluralityof external contacts operably coupled to the integrated circuit. Themethod further includes constructing a plurality of stand-offs oncorresponding imaging dies so that the individual stand-offs form aperimeter around an associated image sensor and attaching the imagingdies to a support member. The method further includes electricallyconnecting the external contacts of the imaging dies to correspondingterminals on the support member and coupling a plurality of covers tocorresponding imaging dies. The covers are carried by the stand-offs andpositioned over corresponding image sensors.

Another aspect of the invention is directed toward microelectronicimaging units. In one embodiment, an assembly of microelectronic imagingunits includes a support member and a plurality of imaging dies attachedto the support member. The individual imaging dies have an image sensor,an integrated circuit operably coupled to the image sensor, and aplurality of external contacts operably coupled to the integratedcircuit. The assembly further includes (a) a plurality of stand-offs oncorresponding imaging dies outboard the image sensors and (b) aplurality of covers coupled to corresponding stand-offs and positionedover the associated image sensors. The individual stand-offs include atleast a portion inboard the external contacts.

Specific details of several embodiments of the invention are describedbelow with reference to CMOS imaging units to provide a thoroughunderstanding of these embodiments, but other embodiments can use CCDimaging units or other types of solid-state imaging devices. Severaldetails describing structures or processes that are well known and oftenassociated with other types of microelectronic devices are not set forthin the following description for purposes of brevity. Moreover, althoughthe following disclosure sets forth several embodiments of differentaspects of the invention, several other embodiments of the invention canhave different configurations or different components than thosedescribed in this section. As such, it should be understood that theinvention may have other embodiments with additional elements or withoutseveral of the elements described below with reference to FIGS. 2-9.

B. Embodiments of Methods for Manufacturing Microelectronic ImagingUnits

FIGS. 2-5 illustrate stages in one embodiment of a method formanufacturing a plurality of microelectronic imaging units. FIG. 2, forexample, is a schematic side cross-sectional view of a microfeatureworkpiece 104 having a substrate 105 and a plurality of microelectronicimaging dies 110 (only three are shown) formed in and/or on thesubstrate 105. The individual imaging dies 110 include an image sensor112, an integrated circuit 114 (shown schematically) operably coupled tothe image sensor 112, and a plurality of external contacts 116 (e.g.,bond-pads) operably coupled to the integrated circuit 114. The imagesensors 112 can be CMOS devices or CCD image sensors for capturingpictures or other images in the visible spectrum. The image sensors 112may also detect radiation in other spectrums (e.g., IR or UV ranges).

After forming the imaging dies 110, a stand-off layer 132 is formedacross the microfeature workpiece 104. The stand-off layer 132 can beformed on the workpiece 104 by spin-on, film lamination, or othersuitable processes. The stand-off layer 132 has a precise thickness T,which corresponds to a desired distance between the image sensors 112and corresponding covers (FIG. 5), which are placed over the imagesensors 112 as described in greater detail below.

FIG. 3A is a top plan view of the microfeature workpiece 104 afterforming a plurality of openings 133 and 134 in the stand-off layer 132.FIG. 3B is a schematic side cross-sectional view taken substantiallyalong line A-A of FIG. 3A. Referring to both FIGS. 3A and 3B, theillustrated openings 133 expose corresponding image sensors 112 and aportion of a first surface 106 of the workpiece 104 outboard the imagesensors 112. In several embodiments, the openings 133 may not expose aportion of the first surface 106 outboard the image sensors 112. In theillustrated embodiment, the individual openings 134 expose adjacentexternal contacts 116 of adjoining imaging dies 110. In additionalembodiments, such as those described below with reference to FIGS. 6A-7,the individual openings 134 may expose only a single contact 116.

The stand-off layer 132 can include an epoxy, a polyimide, or anothersuitable photo-patternable material. In such embodiments, the openings133 and 134 are formed by placing a mask on the stand-off layer 132,exposing and developing the mask, and removing portions of the layer 132over the image sensors 112 and the contacts 116. In other embodiments,the openings 133 and 134 can be formed by stamping, imprinting, or othersuitable processes. Moreover, in several embodiments, a stand-off layercan be formed with the openings 133 and 134 by stereolithography, screenprinting, stencil printing, or other suitable techniques. In any ofthese embodiments, after forming the stand-off layer 132 and theopenings 133 and 134, the microfeature workpiece 104 can be cut alonglines B-B (FIG. 3B) by scribing, sawing, or other suitable processes tosingulate the individual imaging dies 110.

FIG. 4A is a schematic side cross-sectional view of an assembly 100including the singulated microelectronic imaging dies 110 (only two areshown) arranged in an array on a support member 160. The individualsingulated imaging dies 110 include a first side 111, a second side 113opposite the first side 111, and a plurality of ends 115 extending fromthe first side 111 to the second side 113. The second side 113 of theimaging dies 110 is attached to the support member 160 with an adhesive120, such as an adhesive film, epoxy, or other suitable material.

The support member 160 can be a lead frame or a substrate, such as aprinted circuit board, for carrying the imaging dies 110. In theillustrated embodiment, the support member 160 includes a first side 162having a plurality of terminals 166 and a second side 164 having aplurality of pads 168. The terminals 166 can be arranged in arrays forattachment to corresponding external contacts 116 of the dies 110, andthe pads 168 can be arranged in arrays for attachment to a plurality ofconductive couplers (e.g., solder balls). The support member 160 furtherincludes a plurality of conductive traces 169 electrically coupling theterminals 166 to corresponding pads 168.

FIG. 4B is a top plan view of the assembly 100 illustrated in FIG. 4A.Referring to both FIGS. 4A and 4B, the individual imaging dies 110include a corresponding stand-off 130 projecting from the first side111. The individual stand-offs 130 include a plurality of openings 134 aover corresponding contacts 116, a first portion 136 directly betweenadjacent contacts 116, and a second portion 138 inboard the contacts 116and outboard the image sensor 112. The illustrated openings 134 a areslots with an open end proximate to the end 115 of the die 110.Accordingly, the first portion 136 of the stand-offs 130 separatesadjacent slots, and the second portion 138 forms a perimeter around thecorresponding image sensor 112. The illustrated stand-offs 130 also havea generally flat top surface 131 for supporting covers (FIG. 5) and aheight T (FIG. 4A) that corresponds to a precise distance between theimage sensors 112 and the covers, as described below with reference toFIG. 5. In additional embodiments, the stand-offs 130 can have otherconfigurations. For example, the stand-offs may not include the firstportion 136 between adjacent contacts 116, but rather the stand-offs maybe entirely inboard the contacts 116 and outboard the image sensors 112.Moreover, the top surface of the stand-offs may not be flat and/or theopenings can be holes rather than slots, as described in greater detailbelow with reference to FIGS. 6A-7.

The illustrated assembly 100 further includes a plurality of wire-bonds140 electrically coupling the external contacts 116 of the imaging dies110 to corresponding terminals 166 on the support member 160. Theindividual wire-bonds 140 include (a) a proximal portion 142 attached toone of the contacts 116 and received in a corresponding opening 134 aand (b) a distal portion 144 attached to the corresponding terminal 166.In other embodiments, the external contacts 116 can be electricallyconnected to the terminals on a support member by conductivethrough-wafer interconnects. Through-wafer interconnects are describedin U.S. patent application Ser. No. 10/713,878, filed on Nov. 13, 2003,which is hereby incorporated by reference.

FIG. 5 is a schematic side cross-sectional view of the assembly 100after (a) attaching a plurality of covers 150 to correspondingstand-offs 130 and (b) depositing a fill material 180 onto the supportmember 160 between adjacent dies 110. The covers 150 can be attached tothe top surface 131 of the stand-offs 130 with an adhesive 151, such asepoxy or acrylic. Alternatively, the stand-offs 130 can be formed of anadhesive material so that an additional adhesive is unnecessary. Ineither case, the individual covers 150 are positioned over correspondingimage sensors 112 and can be glass, quartz, or another suitable materialthat is transmissive to the desired spectrum of radiation. The covers150, for example, can further include one or more anti-reflective filmsand/or filters. The individual covers 150 are spaced apart from theimage sensors 112 by a predetermined and precise distance G, whichcorresponds to the height T (FIG. 4A) of the stand-offs 130.Accordingly, the covers 150, the stand-offs 130, and the first side 111of the dies 110 define cells 152, which can be filled with gas, such asair, or an underfill material, as described below with reference to FIG.7. In other embodiments, the assembly 100 can include a single coverattached to multiple stand-offs 130 and covering several imaging dies110. In several embodiments, the stand-offs 130 can be formed on thecovers 150 rather than the imaging dies 110, as described above withreference to FIGS. 2-3B. In such embodiments, after forming thestand-offs 130 on the covers 150, pairs of stand-offs 130 and covers 150can be attached as units to corresponding imaging dies 110.

After attaching the covers 150 to the stand-offs 130, the fill material180 is dispensed onto the support member 160 between adjacent imagingdies 110. The fill material 180 can be an epoxy mold compound or anothersuitable material to at least partially encapsulate the imaging dies110, the stand-offs 130, the wire-bonds 140, and the covers 150. Assuch, the fill material 180 (a) increases the robustness of the assembly100, (b) enhances the integrity of the joint between the individualcovers 150 and the imaging dies 110, and (c) protects the image sensors112 from moisture, chemicals, and other contaminants. After depositingthe fill material 180 onto the support member 160, the assembly 100 canbe heated to at least partially cure (i.e., B-stage) the fill material180, the adhesive 151, and/or the stand-offs 130. After curing, theassembly 100 can be cut along lines C-C to singulate individual imagingunits 102.

One feature of the imaging units 102 illustrated in FIG. 5 is that thestand-offs 130 are attached to the imaging dies 110. An advantage ofthis feature is that the footprint of the individual imaging units 102is smaller than the footprint of conventional imaging units. The reducedfootprint of the imaging units 102 is particularly advantageous forpicture cell phones, PDAs, or other applications where space is limited.In prior art devices, such as the imaging unit 1 illustrated in FIG. 1,the sidewalls 34 of the chip carrier 30 are outboard the terminals 18and the wire-bonds 20, which increases the footprint of the imaging unit1.

One feature of the method for manufacturing imaging units 102illustrated in FIGS. 2-5 is that the support member 160 can carryimaging dies 110 with different sizes and/or configurations. Anadvantage of this feature is that the method can be easily adapted tohandle various configurations of imaging dies without significantchanges to the fabrication process. Prior art methods, such as themethod required to form the imaging unit 1 described above withreference to FIG. 1, may require significant retooling because the chipcarriers 30 can only carry imaging dies 10 with a certain shape andsize.

Another advantage of the method for manufacturing imaging units 102illustrated in FIGS. 2-5 is that the method is expected to significantlyenhance the efficiency of the manufacturing process because a pluralityof imaging units 102 can be fabricated simultaneously using highlyaccurate and efficient processes developed for packaging andmanufacturing semiconductor devices. This method of manufacturingimaging units 102 is also expected to enhance the quality andperformance of the imaging units 102 because the semiconductorfabrication processes can reliably produce and assemble the variouscomponents with a high degree of precision. As such, several embodimentsof the method are expected to significantly reduce the cost forassembling microelectronic imaging units 102, increase the performanceof the imaging units 102, and produce higher quality imaging units 102.

C. Additional Embodiments of Methods for Manufacturing MicroelectronicImaging Units

FIGS. 6A-7 illustrate stages in another embodiment of a method formanufacturing a plurality of microelectronic imaging units 202 inaccordance with the invention. For example, FIG. 6A is a schematic sidecross-sectional view and FIG. 6B is a top plan view of an assembly 200including a plurality of microelectronic imaging dies 110 (only twoshown) arranged in an array on a support member 160. The illustratedassembly 200 is generally similar to the assembly 100 described abovewith reference to FIGS. 4A and 4B. For example, the illustrated assembly200 includes a plurality of stand-offs 230 disposed on correspondingimaging dies 110. The illustrated stand-offs 230 include a first portion236 (FIG. 6B) between adjacent contacts 116, a second portion 237outboard the external contacts 116, and a third portion 238 inboard theexternal contacts 116. The stand-offs 230 also have a height D₁, anarcuate top surface 231 (FIG. 6A), and a plurality of openings 234 abetween the second and third portions 237 and 238. The illustratedopenings 234 a are holes aligned with corresponding external contacts116 and positioned toward an outer portion of the stand-offs 230. Assuch, the openings 234 a include an outer wall 233 with a height D₂(FIG. 6A) and an inner wall 239 with a height D₃ (FIG. 6A) greater thanthe height D₂ of the outer wall 233.

FIG. 7 is a schematic side cross-sectional view of the assembly 200after wire-bonding the imaging dies 110 to the support member 160 andattaching a plurality of covers 150 to corresponding dies 110. Theindividual wire-bonds 140 include (a) a proximal portion 142 attached toone of the external contacts 116 and received in a corresponding opening234 a and (b) a distal portion 144 attached to the correspondingterminal 166. Because the height D₁ of the stand-offs 230 exceeds theheight D₂ of the outer wall 233 of the openings 234 a, the wire-bonds140 can be formed so that they do not project above the height D₁ of thestand-offs 230 and interfere with the attachment of the covers 150 tothe top surface 231 of the stand-offs 230. The covers 150 can beattached to corresponding stand-offs 230 with an adhesive, or,alternatively, the stand-offs 230 can be made of an adhesive material.

The illustrated assembly 200 can optionally include an underfill 254disposed across the first side 111 of the imaging dies 110. As such, theunderfill 254 covers the image sensors 112 and fills the cells 152between the covers 150 and the imaging dies 110. The underfill 254 canbe an optical grade material with a high transparency to eliminate orreduce light scattering and/or the loss of images. In applications inwhich the image sensor 112 has pixels with a smaller size, the underfill254 can have a higher refractive index to assist in focusing the lightfor the pixels.

One feature of the imaging units 202 illustrated in FIG. 7 is that theunderfill 254 can be a material that is dimensionally stable over a widerange of temperatures. An advantage of this feature is that the distancebetween the covers 150 and the corresponding image sensors 112 remainsgenerally consistent, even if the imaging units 202 operate in anenvironment that experiences significant changes in ambient temperature.If the temperature change were to cause the medium between the cover 150and the image sensor 112 to expand or contract, the associated change inthe distance between the cover 150 and the image sensor 112 could skewthe images and reduce the life of the imaging unit 202 due to fatigue.

FIGS. 8A-9 illustrate stages in another embodiment of a method formanufacturing a plurality of microelectronic imaging units 302 inaccordance with the invention. For example, FIG. 8A is a schematic sidecross-sectional view and FIG. 8B is a top plan view of an assembly 300including a plurality of imaging dies 110 (only two shown) arranged inan array on a support member 160. The illustrated assembly 300 isgenerally similar to the assembly 200 described above with reference toFIGS. 6A and 6B. For example, the illustrated assembly 300 includes aplurality of stand-offs 330 disposed on corresponding imaging dies 110.The illustrated stand-offs 330, however, do not include openings, butrather encapsulate the proximal portion 142 of the individual wire-bonds140. The stand-offs 330 can be formed by dispensing a flowable materialonto the imaging dies 110 after wire-bonding the dies 110 to the supportmember 160. Although in the illustrated embodiment the stand-offs 330are disposed over the external contacts 116, in other embodiments, thestand-offs 330 can be inboard or outboard the contacts 116.

FIG. 9 is a schematic side cross-sectional view of the assembly 300after attaching a plurality of covers 150 to corresponding imaging dies110. The covers 150 can be attached directly to the stand-offs 330 inembodiments in which the stand-offs 330 include an adhesive material.For example, the stand-offs 330 can include a UV- or thermally-curableadhesive material. In other embodiments, an adhesive can be placed on aperimeter portion of the covers 150 and/or a top surface of thestand-offs 330 to adhere the covers 150 to the stand-offs 330. Inseveral embodiments, the stand-offs 330 can be formed on the covers 150and then the covers 150 and the stand-offs 330 can be attached as unitsto the imaging dies 110.

From the foregoing, it will be appreciated that specific embodiments ofthe invention have been described herein for purposes of illustration,but that various modifications may be made without deviating from thespirit and scope of the invention. For example, the microelectronicimaging units can have any combination of the features described above.Accordingly, the invention is not limited except as by the appendedclaims.

1. A plurality of microelectronic imaging units, comprising: a supportmember; a plurality of imaging dies attached to the support member, theindividual imaging dies comprising an image sensor, an integratedcircuit operably coupled to the image sensor, and a plurality ofexternal contacts operably coupled to the integrated circuit; aplurality of stand-offs on corresponding imaging dies, the individualstand-offs forming a perimeter around associated image sensors; and aplurality of covers carried by corresponding stand-offs and positionedover associated image sensors; wherein the individual stand-offscomprise an adhesive material, and wherein the adhesive material is aUV-curable material.
 2. The microelectronic imaging units of claim 1wherein the individual stand-offs comprise a plurality of openingsaligned with corresponding external contacts.
 3. The microelectronicimaging units of claim 1 wherein the individual stand-offs comprise agenerally flat top surface.
 4. The microelectronic imaging units ofclaim 1 wherein the individual stand-offs comprise a generally arcuatetop surface.
 5. The microelectronic imaging units of claim 1 wherein thesupport member includes a plurality of terminals, wherein the imagingunits further comprise a plurality of wire-bonds electrically couplingthe external contacts to corresponding terminals on the support member,and wherein the stand-offs encapsulate a portion of the individualwire-bonds.
 6. The microelectronic imaging units of claim 1 wherein: thesupport member includes a plurality of terminals; the stand-offs includea plurality of openings aligned with corresponding external contacts;and the imaging units further comprise a plurality of wire-bondselectrically coupling the external contacts to corresponding terminals,the individual wire-bonds including (a) a distal portion attached to oneof the terminals and (b) a proximal portion attached to thecorresponding external contact and received in the associated opening.7. The microelectronic imaging units of claim 1, further comprising afill material disposed on the support member between adjacent imagingdies for encapsulating at least a portion of the individual imagingdies.
 8. The microelectronic imaging units of claim 1 wherein theindividual stand-offs include a portion between adjacent externalcontacts.
 9. The microelectronic imaging units of claim 1 wherein theindividual stand-offs are outboard the corresponding image sensor andinclude at least a portion inboard the external contacts.
 10. Aplurality of microelectronic imaging units, comprising: a support memberhaving a plurality of terminal arrays; a plurality of imaging diesattached to the support member, the individual imaging dies comprisingan image sensor, an integrated circuit operably coupled to the imagesensor, and a plurality of external contacts operably coupled to theintegrated circuit and electrically coupled to corresponding terminalson the support member; a plurality of stand-offs on correspondingimaging dies outboard the image sensors, the individual stand-offsincluding at least a portion inboard the external contacts; and aplurality of covers coupled to corresponding stand-offs and positionedover the associated image sensors.
 11. The microelectronic imaging unitsof claim 10 wherein the individual stand-offs comprise a plurality ofopenings aligned with corresponding external contacts.
 12. Themicroelectronic imaging units of claim 10, further comprising aplurality of wire-bonds electrically coupling the external contacts tocorresponding terminals on the support member, wherein the stand-offsencapsulate a portion of the individual wire-bonds.
 13. Themicroelectronic imaging units of claim 10 wherein: the stand-offsinclude a plurality of openings aligned with corresponding externalcontacts; and the imaging units further comprise a plurality ofwire-bonds electrically coupling the external contacts to thecorresponding terminals, the individual wire-bonds including (a) adistal portion attached to one of the terminals and (b) a proximalportion attached to the corresponding external contact and received inthe associated opening.
 14. The microelectronic imaging units of claim10 wherein the stand-offs form perimeters around corresponding imagesensors.
 15. The microelectronic imaging units of claim 10, furthercomprising a fill material disposed on the support member betweenadjacent imaging dies for encapsulating at least a portion of theindividual imaging dies.
 16. The microelectronic imaging units of claim10 wherein the individual stand-offs include a portion between adjacentexternal contacts.
 17. A plurality of microelectronic imaging units,comprising: a support member; a plurality of imaging dies attached tothe support member, the individual imaging dies comprising an imagesensor, an integrated circuit operably coupled to the image sensor, anda plurality of external contacts operably coupled to the integratedcircuit; a plurality of stand-offs on corresponding imaging dies, theindividual stand-offs having a portion between adjacent externalcontacts; and a plurality of covers carried by corresponding stand-offsand positioned over associated image sensors; wherein the individualstand-offs comprise a plurality of openings aligned with correspondingexternal contacts.
 18. The microelectronic imaging units of claim 17wherein the stand-offs form perimeters around corresponding imagesensors.
 19. The microelectronic imaging units of claim 17 wherein thesupport member includes a plurality of terminals, wherein the imagingunits further comprise a plurality of wire-bonds electrically couplingthe external contacts to corresponding terminals, and wherein thestand-offs encapsulate a portion of the individual wire-bonds.
 20. Themicroelectronic imaging units of claim 17 wherein: the support memberincludes a plurality of terminals; the stand-offs include a plurality ofopenings aligned with corresponding external contacts; and the imagingunits further comprise a plurality of wire-bonds electrically couplingthe external contacts to corresponding terminals, the individualwire-bonds including (a) a distal portion attached to one of theterminals and (b) a proximal portion attached to the correspondingexternal contact and received in the associated opening.
 21. Themicroelectronic imaging units of claim 17, further comprising a fillmaterial disposed on the support member between adjacent imaging diesfor encapsulating at least a portion of the individual imaging dies. 22.The microelectronic imaging units of claim 17 wherein the individualstand-offs are outboard the corresponding image sensor and include aportion inboard the external contacts.
 23. A microfeature workpiece,comprising: a plurality of imaging dies including an image sensor, anintegrated circuit operably coupled to the image sensor, and a pluralityof external contacts operably coupled to the integrated circuit; and aplurality of stand-offs on corresponding imaging dies outboard the imagesensors, the individual stand-offs including at least a portion inboardthe external contacts; wherein the individual stand-offs comprise aplurality of openings aligned with corresponding external contacts. 24.The microfeature workpiece of claim 23 wherein the stand-offs formperimeters around corresponding image sensors.
 25. A microfeatureworkpiece, comprising: a substrate; a plurality of imaging dies inand/or on the substrate, the individual imaging dies comprising an imagesensor, an integrated circuit operably coupled to the image sensor, anda plurality of bond-pads operably coupled to the integrated circuit; anda plurality of stand-offs on corresponding imaging dies, the individualstand-offs having a portion between adjacent bond-pads; wherein theindividual stand-offs comprise a plurality of openings aligned withcorresponding bond-pads.
 26. The microfeature workpiece of claim 25wherein the stand-offs form perimeters around corresponding imagesensors.
 27. A microelectronic imaging unit, comprising: a supportmember having a plurality of terminals; an imaging die attached to thesupport member, the imaging die comprising an image sensor, anintegrated circuit operably coupled to the image sensor, and a pluralityof external contacts operably coupled to the integrated circuit; aplurality of wire-bonds having a proximal portion coupled to one of theexternal contacts and a distal portion coupled to a correspondingterminal; a stand-off on the imaging die, the stand-off encapsulatingthe proximal portion of the individual wire-bonds; and a cover coupledto the stand-off and positioned over the image sensor; wherein thestand-off comprises an adhesive material, and wherein the adhesivematerial is a UV-curable material.
 28. The microelectronic imaging unitof claim 27, further comprising a fill material encapsulating at least aportion of the imaging die.
 29. The microelectronic imaging unit ofclaim 27 wherein the stand-off includes a portion between adjacentexternal contacts.
 30. The microelectronic imaging unit of claim 27wherein the stand-off is outboard the image sensor and includes aportion inboard the external contacts.
 31. A microelectronic imagingunit, comprising: a support member having a plurality of terminals; animaging die attached to the support member, the imaging die comprisingan image sensor, an integrated circuit operably coupled to the imagesensor, and a plurality of external contacts operably coupled to theintegrated circuit; a stand-off on the imaging die, the stand-off havinga plurality of openings aligned with corresponding external contacts; aplurality of wire-bonds having (a) a distal portion coupled to one ofthe terminals and (b) a proximal portion coupled to the correspondingexternal contact and received in the associated opening; and a covercarried by the stand-off and positioned over the image sensor.
 32. Themicroelectronic imaging unit of claim 31 wherein the openings compriseholes.
 33. The microelectronic imaging unit of claim 31 wherein theopenings comprise slots.
 34. The microelectronic imaging unit of claim31 wherein the stand-off forms a perimeter around the image sensor. 35.The microelectronic imaging unit of claim 31, further comprising a fillmaterial encapsulating at least a portion of the imaging die.
 36. Themicroelectronic imaging unit of claim 31 wherein the stand-off isoutboard the image sensor and includes a portion inboard the externalcontacts.